240— Target Characterization Using Rutherford Backscattering Spectroscopy

Rutherford backscattering spectroscopy (RBS) is a non-destructive ion-beam analytical technique that is used to determine properties of a target such as thickness, areal density, and elemental composition. This scattering is the result of Coulomb forces between the target atoms and the incident particle. The energy spectrum of the scattered ions depends on the atomic number of the target atoms as well as the target thickness.